"Method for cleaning scale of single crystal silicon furnace" invented by Xi'an Optical Machinery

<

At present, the scale cleaning of precision machinery such as single crystal silicon furnaces is carried out with a single cleaning solution. However, due to the complexity of the above mechanical structure and the inclusion of parts of many different materials, it is not possible to use a single cleaning solution for thorough cleaning. Removing scale can also cause some materials to be corroded. Failure to completely remove scale will increase the practical cost of the above machinery, and may cause huge safety hazards when corroding some materials.

Researchers at the Xi'an Institute of Optics and Precision Mechanics of the Chinese Academy of Sciences have conducted in-depth research on this issue and invented a cleaning method for cleaning scale formed in the furnace of single crystal silicon furnace, which is mainly used for cleaning scale of precision machinery such as single crystal silicon furnace. This method solves the problem that the existing cleaning method cannot thoroughly clean the scale in the furnace of the single crystal silicon furnace, or may cause damage to other materials in the furnace of the single crystal silicon during cleaning.

The method for cleaning the scale of the single crystal silicon furnace is: first put a certain amount of water into the storage tank with ultrasonic oscillation and heating device, and heat the water to 10 ~ 60 ℃; slowly add the acid to the storage tank , Turn on the ultrasonic wave to stir; through the high-speed scouring and reaction of the cleaning liquid to clean the scale and other steps, completely clean the scale.

This method was granted the invention patent authorization on May 2 with the patent number "ZL201010574823.7".

Cheese Tools

Cheese Tools,Cheese Spreaders,Cheese Spreader Knife,Cheese Tool Set

Liveon Industrial Co.,Ltd. , https://www.kitchenknifes.de